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Datacon Technology Joins EMC-3D Consortium to Develop Cost-Effective 3D Thru-Silicon-Via Interconnects Die Bonding & Sorting Equipment Manufacturer Datacon Joins EMC-3D to Provide High-Preci

SOURCE:

Semitool

2008-04-08 05:00:00

Datacon Technology Joins EMC-3D Consortium to Develop Cost-Effective 3D Thru-Silicon-Via Interconnects

Die Bonding & Sorting Equipment Manufacturer Datacon Joins EMC-3D to Provide High-Preci

RADFIELD, AUSTRIA–( EMWNews – April 8, 2008) – The international semiconductor equipment

and materials consortium EMC3D today announced that Datacon Technology has

joined the organization. EMC3D is dedicated to providing cost-effective

integrated Thru-Silicon-Via (TSV) technology for chip stacking

applications.

EMC-3D is addressing the technical, integration and economic issues of

creating 3-D interconnects using TSV technology for chip stacking and

advanced MEMS/sensors packaging. Through collaboration with research

partners, the consortium will develop unit processes for creating

micro-vias between 5 and 30 µm on 50µm thinned 200mm and 300mm wafers using

via-first and die-to-wafer techniques. The primary goals of the consortium

are to create a robust integrated process flow at a cost of less than

$200USD per wafer.

Datacon provides die bonding and sorting equipment used in advanced

assembly by the semiconductor and telecommunications industries. One of

the key integration issues in 3D interconnect is the efficiency and

accuracy of the die-to-wafer attach for both TSV and MEMS/sensor

applications.

“One of the challenging integration issues of TSV is the die-to-wafer

bonding and the cost associated with this step,” said Markus Wimplinger,

EMC3D board member and director of business unit technology development at

EV Group. “Datacon will bring a significant expertise needed to achieve

the aggressive goals of the EMC3D consortium.”

About Datacon

Datacon Technology GmbH is a leading global manufacturer of die bonding &

sorting equipment for the semiconductor, telecommunication and automotive

industries. Datacon was founded in 1986 and since the beginning of 2005

has been part of the Dutch Besi group (BE Semiconductor Industries N.V.),

an international group of companies operating in the semiconductor

industry. Datacon’s primary expertise is the development and production of

high-precision assembly equipment for the advanced packaging market.

About EMC-3D (or EMC3D)

EMC3D (Semiconductor 3D Equipment and Materials Consortium) was created in

October 2006 to develop a new 3D market and technology by demonstrating a

cost-effective, manufacturable, stackable TSV interconnection process for

IC and MEMS/Sensor packaging.

www.EMC3D.org

Contacts for EMC3D Members include:

Equipment Members:


Alcatel, France; (PARIS: CGEP) and (NYSE: ALA) Jean-Marc Gruffat, Director

 of Business Development

     Technology: Si and dielectric etching using DRIE

Datacon Technology GmbH, Austria; Christoph Scheiring, Director Product

   Marketing

     Technology: Precision Diebonding & Sorting

EV Group, Austria; Thorsten Matthias, Director of Technology North America

     Technology: bonding, thin wafer handling, mask alignment lithography,

      conformal coat and develop

SEMITOOL Inc, USA; (NASDAQ: SMTL), Rozalia Beica, 3D Business and

 Technology Director

     Technology: electroplating, DOB, metal/barrier etch, photoresist

      strip, wafer cleaning and thinning

XSiL Ltd, Ireland; Dr. Alexey Rodin, Via Team Leader

     Technology: Si laser machining, via drilling, and wafer dicing

Isonics Corp, USA; (NASDAQ: ISON) Joanna Lohkamp, General Manager

     Technology: wafer service (reclaim and test wafers, wafer thinning,

      and thick-film SOI wafers)

Materials Members:


AZ Electronic Materials, USA; Aldo Orsi, Global Product Manager

     Technology: positive and negative acting photoresists

Brewer Science, Inc., USA; Laura Mauer, Associate Director of R&D Advanced

 Technologies

     Technology: Materials used in litho, wafer thinning, wafer etching and

      anti-reflective coatings as well as spin-coat/develop/bake equipment.

Enthone (Cookson Electronics), USA; Yun Zhang, Director, Research and

 Development

     Technology: chemistry for electroplating and metal etch

Rohm and Haas, USA; Bob Forman, Advanced Packaging Business Manager

     Technology: chemistry for lithography, plating, etching, dielectric

      formation, and bonding

Technology Members:


CEA-LETI, Grenoble France; Mark Scannell, Microelectronics Program Manager

Fraunhofer IZM, Germany; Jürgen Wolf, Group and Project Manager

KAIST (Korea Advanced Institute of Science and Technology), Korea;

 Dr. Kyung-Wook Paik, Professor

NXP, Dr. Fred Roozeboom, Technical Advisor

SAIT (Samsung Advanced Institute of Technology), Korea; Dr. Yoon-Chul Sohn,

 Researcher

TAMU (Texas A&M University), USA; Dr. Manuel Soriaga, Professor

Contacts:

Datacon Technology GmbH
Christoph Scheiring
Director Product Marketing Diebonding & Sorting
+43 5337 600-146

EMC-3D
Paul Siblerud
Vice President
Semitool Inc
406.752.2107

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