Fab Process Engineers Conduct Comparative Analysis of Equipment Acceleration, Vibration With New VibeReview Software for Wireless Accelerometer From CyberOptics Semiconductor, Inc. — WaferSense(TM) AVS
2008-08-06 08:10:00
Fab Process Engineers Conduct Comparative Analysis of Equipment Acceleration, Vibration With New VibeReview Software for Wireless Accelerometer From CyberOptics Semiconductor, Inc. — WaferSense(TM) AVS
Fab Process Engineers Conduct Comparative Analysis of Equipment Acceleration, Vibration With New VibeReview Software for Wireless Accelerometer From CyberOptics Semiconductor, Inc. — WaferSenseTM AVS
WaferSense AVS’ Expanded VibeView 1.5 Indicates Vibration Frequency, Go, No-Go Parameters; New 300mm Light Version Directly Enters Chambers
BEAVERTON, OR–(EMWNews – August 6, 2008) – Software engineers at a maker of wireless metrology devices for wafer
processing equipment, CyberOptics Semiconductor, Inc. (CSI), have
recently developed companion applications that allow fab engineers to
evaluate equipment acceleration and vibration via comparative analysis of
log file data and real-time frequency and
spec-limit readings in conjunction with the company’s wafer-like
accelerometer
— the WaferSense
Auto Vibration System (AVS), according to Dennis J. Bonciolini, the
company’s CTO.
The amplitude and frequency of vibrations generated by fab process
equipment and automated material handling systems, when tracked,
effectively serve as predictors of robot and transfer-equipment failures
and indicators of both wafer particle-contamination sources and inefficient
movement by cassettes,
SMIFs and FOUPs, according to Bonciolini.
Bonciolini said the company, a subsidiary of CyberOptics Corp. (
help process engineers further review and analyze data generated by the
wafer-like AVS. Engineers use the data to establish yield-based vibration
standards for equipment and technicians, identify links between vibration
frequency, such as isolated shocks versus steady humming, and likely
sources and acceptable acceleration parameters for equipment.
“With the data, you can see that there’s really a direct relationship
between yield and the speed and vibration of equipment across the fab,”
Bonciolini said. “The more you optimize acceleration and limit vibration,
you’re going to encounter less downtime and contaminated wafers and improve
your cycle time.”
The company’s new VibeReview 1.5 for AVS replays stored log file data for
engineers to compare different run-times, tools and trigger values for
acceleration during wafer transfer in x, y and z directions at a range of
+/-2G. The improved VibeView 1.5 for AVS allows engineers to evaluate
vibration frequency between 0 and 200 Hz and establish ongoing, real-time
spec limits or go, no-go values, including RMS. Users can also pause and
resume data recording, create log-file titles and export data to Excel and
MATLAB.
Bonciolini added that CyberOptics Semiconductor also reduced the form
factor of the AVS device’s carbon fiber composite housing to develop a
lighter, more flexible 300mm version. The light 300mm device now weighs 190
grams, down from 225 grams, and is primarily designed to enter slit valves
and vacuum chambers without exposing process areas to the environment.
“The lighter device can access more equipment at 300mm fabs and essentially
identify more wafer-damaging processes,” Bonciolini said.
WaferSense AVS’ key specifications and features include form factors of
SEMI 200mm notch or flat and 300mm, range of +/-2G, resolution of +/-0.01G,
operating pressure of 760 to less than 10 -6 Torr, operating temperature of
20 to 70 degrees Celsius, height of 6.3mm, weight of 150gm at 200mm and
190gm at 300mm (light), wireless Bluetooth link, four hour run-time per
battery charge and use with Windows 2000, XP and Vista.
The WaferSense AVS package includes the vibration-sensing wafer,
USB-compatible link, VibeView and VibeReview graphical software CD,
charging case and suitcase.
The WaferSense family of products includes the Auto Vibration System (AVS),
Auto Leveling System (ALS), Auto Teaching System (ATS) and Auto Gapping
System (AGS). Each device follows the processing life of a wafer.
About CyberOptics Semiconductor, Inc.
CyberOptics Semiconductor develops automated products that seamlessly
measure critical parameters in semiconductor fabrication processes and
equipment. The company’s pioneering WaferSense line includes wireless
metrology devices for vibration, leveling, gapping and teaching
semiconductor process equipment. The company is the largest producer of reflective wafer-mapping sensors and a leading provider of frame grabber machine vision boards
under its HAMA Sensors and Imagenation brands. CyberOptics Semiconductor
is a subsidiary of CyberOptics Corp. (
leading providers of process yield and throughput improvement solutions for
electronic assembly and semiconductor capital equipment companies. For
information, visit http://www.cyberopticssemi.com/, e-mail
[email protected] or call
800-366-9131.
“Safe Harbor” Statement under the Private Securities Litigation Reform Act
of 1995: Statements regarding the Company’s anticipated performance are
forward-looking and therefore involve risks and uncertainties, including
but not limited to: market conditions in the global SMT and semiconductor
capital equipment industries; increasing price competition and price
pressure on our product sales, particularly our SMT systems; the level of
orders from our OEM customers; the availability of parts required for
meeting customer orders; the effect of world events on our sales, the
majority of which are from foreign customers; product introductions and
pricing by our competitors; unanticipated costs or delays associated with
the transition of engineering and manufacturing for SMT Systems to
Singapore and other factors set forth in the Company’s filings with the
Securities and Exchange Commission.
Note: all trademarks and registered trademarks are the property of their
respective owners.
Contacts:
Ehrlich Written Communications CyberOptics Semiconductor, Inc. |
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